Pulsed Laser Beam Deposition (PLD)
"Large Scale" Rotary Irradiation Heaters Non-contact radiation heating, can be reversed to prepare double-sided films. The dense arrangement of furnace wires increases the heating load. Resistant to pure oxygen annealing atmosphere below 1 atmosphere pressure.
Metal Organic Chemical Vapor Deposition (MOCVD)
Scanning electron microscope（SEM） was used to analyze the microstructure of the film. Analysis of elemental composition using energy dispersive spectrometer（EDS）; X-ray diffraction（XRD） was used to analyze the microstructure of the film. The critical current density of the film was measured by Jc-scan critical current density measurement system. The microwave surface resistance（Rs） of thin films was measured by sapphire dielectric resonator.
AJA Magnetron Sputtering
Ultimate Vacuum: Better than5x10-8 Torr. Holds eight 2-inch confocal sputtering in-situ deflection target sources and three 2-inch