YBCO single mask
Parameter index
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Characterization of YBa2Cu3O7-x thin films on 2-inch single-sided LaAlO3 substrates
Preparation method: three-beam pulsed laser co-deposition system (3B-PLD)
| Microwave Surface Resistance Rs < 0.24 mΩ @77 K @10GHz |
| Critical current density Jc ~ 3.0 MA/cm2 @77 K |
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Jc分布均匀
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膜厚分布＜±0.5%
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R-T测试：Tc0 ＞ 92 K，分布均匀且稳定可重复
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