SrTiO₃ Standard Reference Sample
Parameter index
Applications
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Characterization of SrTiO3 thin films on 2-inch single-sided LaAlO3 substrates
Preparation method: three-beam pulsed laser co-deposition system
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SrTiO3 (STO) Film on LaAlO3 substrate |
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Surface Roughness |
0.366 nm (RMS) |
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FWHM |
0.069° |
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Distribution |
Thickness ±0.9% Lattice Constant ±0.08% |
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Growth Speed |
6.7 nm/min |
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表面形貌
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AFM
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膜厚分布
XRD
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