Enable domestic small solid-state pulsed lasers Modular overall displacement of optical path system Realize multi-beam co-deposition Self-developed large-area heaters Develop control software to realize intelligent operation
| Feature | Details | |
| Substrate | double-side 2'' diameter standard 3'' and 4'' on request | |
| PLD Chamber size | 18'' diameter Spherical chamber standard (Adjustable on request) | |
| Base vaccum | 5.0×10-8 Torr standard (at room temperature) | |
| Standard armored heater | ≤900°C | |
| Substrate Heating | Advanced armored heater | ≤1100°C |
| SiC heater | ≤1600°C | |
| Nd:YAG Laser (Made in China) | Selectable wavelength including 266, 355, 532 and 1064 nm | |
| Maximum Scanning Range | 60mm（Available to prepare 4'' film） | |
| Process gases | O2 , N2 , Ar | |
| Annealing Pressure | ≤ 1 atm | |
| Target Carousel |
3×2'' diameter standard >3×2'' on request |
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| Automation | Open-source Control System based on LabVIEW | |
"Large Scale" Rotary Irradiation Heaters
Non-contact radiation heating, can be reversed to prepare double-sided films
The dense arrangement of furnace wires increases the heating load
Withstands pure oxygen annealing atmosphere below 1 atmosphere pressure
Scanning sputtering enables 'large-scale' thin film deposition
Extremely simplified "straight path" with minimal loss
The overall mobile scanning of laser components ensures consistency and stability
Co-sputter deposition of three laser beams to improve efficiency
Completely open source software and hardware automation control system, support scan compensation
SrTiO3 Standard Reference Sample
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SrTiO3 (STO) Film on LaAlO3 substrate |
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Surface Roughness |
0.366 nm (RMS) |
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FWHM |
0.069° |
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Distribution |
Thickness ±0.9% Lattice Constant ±0.08% |
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Growth Speed |
6.7 nm/min |
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YBa2Cu3O7-x large size film quality
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YBa2Cu3O7-x (YBCO) Film on LaAlO3 substrate |
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Microwave Surface Resistance |
<0.24 mΩ @77 K @10 GHz |
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Critical Current Density |
~ 3.0 MA/cm2 @77 K |
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Surface Roughness |
9.66 nm (RMS) |
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Distribution |
Thickness ±0.46% |
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Growth Speed |
13 nm/min |
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Recently installed
installation time
Introduction to Customized Services
三光束脉冲激光共沉积系统资料