Pulsed Laser Co-Deposition System
Double-sided oblique symmetrical scanning sputtering pulsed laser co-deposition system
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Based on high-throughput technology to rapidly optimize growth process and application parameters, study the high-frequency response mechanism of YBCO thin films

Lay a solid superconducting core foundation for a fully superconducting digital receiver based on high temperature superconductivity

Completed the transfer of large-area laser coating equipment to scientific instrument production (2-inch double-sided single crystal film, batch production)

 

Zhongpei Feng
Double-sided oblique symmetrical scanning sputtering pulsed laser co-deposition system

First-of-its-kind deposition sputtering solution, a feasible way to surpass Germany's ceraco!

 


Double-sided irradiation heating ensures the consistency of "deposition temperature" in time and space;
Films are deposited on the upper and lower surfaces at the same time to ensure the consistency of the performance of the double-sided film;
Large deposition area, can realize batch preparation of multiple films, improve efficiency and ensure performance consistency;

 

The first "PLD factory" with "purely domestic" core technology

 

 

Based on high-throughput technology to rapidly optimize growth process and application parameters, study the high-frequency response mechanism of YBCO thin films

Lay a solid superconducting core foundation for a fully superconducting digital receiver based on high temperature superconductivity

Completed the transfer of large-area laser coating equipment to scientific instrument production (2-inch double-sided single crystal film, batch production)

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